The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2025
Filed:
Jul. 09, 2021
Applicants:
Universiteit Antwerpen, Antwerp, BE;
Imec Vzw, Leuven, BE;
Inventors:
Jan Sijbers, Duffel, BE;
Jan De Beenhouwer, Geraardsbergen, BE;
Yu-Ting Ling, Antwerp, BE;
Wilfried Vandervorst, Leuven, BE;
Assignees:
UNIVERSITEIT ANTWERPEN, Antwerp, BE;
IMEC VZW, Leuven, BE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); G01N 23/04 (2018.01); G01N 23/046 (2018.01);
U.S. Cl.
CPC ...
H01J 37/26 (2013.01); G01N 23/046 (2013.01); G01N 2223/401 (2013.01);
Abstract
A method for determining a three-dimensional atomic distribution of a sample having a tip, during an atom probe tomography process. The method accounts for the tip not being axial symmetric and not having a hemispherical shaped apex throughout the evaporation process.