The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2025
Filed:
Jun. 16, 2021
Applicant:
L'air Liquide, Société Anonyme Pour L'etude ET L'exploitation Des Procédés Georges Claude, Paris, FR;
Inventors:
Takashi Teramoto, Yokosuka, JP;
Christian Dussarrat, Tokyo, JP;
Grigory Nikiforov, Kanata, CA;
Nicolas Blasco, Grenoble, FR;
Jean-Marc Girard, Versailles, FR;
Takashi Ono, Yokosuka, JP;
Keishi Yamamoto, Yokohama, JP;
Masato Hirai, Yokosuka, JP;
Sunao Kamimura, Yokosuka, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); C01F 17/259 (2020.01); C07F 5/00 (2006.01); C23C 16/04 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/405 (2013.01); C01F 17/259 (2020.01); C07F 5/003 (2013.01); C23C 16/045 (2013.01); C23C 16/45527 (2013.01); C23C 16/45553 (2013.01); C01P 2004/03 (2013.01);
Abstract
A genus of rare earth containing chemicals is disclosed. These rare earth containing chemicals are suitable for use in sequential vapor deposition processes to form rare earth fluoride or rare earth oxyfluoride films. Such films may be used to protect materials and devices from corrosive chemicals.