The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2025
Filed:
Apr. 25, 2023
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Abstract
Capacitors for use in semiconductor devices including a plurality of first trenches in a first region of a substrate, the first trenches extending in a first direction, a plurality of second trenches in the first region of the substrate, the second trenches extending in a second direction other than the first direction, with the adjacent second trenches and first trenches cooperating to define protruding structures and island structures having an upper surface that is at or below a plane defined by a portion of an upper surface of a substrate surrounding the first region with a series of film pairs including a dielectric layer and a conductive layer formed in the first and second trenches and the protruding and island structures.