The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2025
Filed:
Mar. 04, 2022
Tokyo Electron Limited, Tokyo, JP;
Fujikin Incorporated, Osaka, JP;
Jun Hirose, Miyagi, JP;
Atsushi Sawachi, Miyagi, JP;
Takahiro Matsuda, Osaka, JP;
Kazunari Watanabe, Osaka, JP;
Kohei Shigyou, Osaka, JP;
Taiki Hoshiko, Osaka, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
FUJIKIN INCORPORATED, Osaka, JP;
Abstract
A gas supply device capable of saving space and supplying a mixed gas having components with stable concentration to a processing chamber in a short time includes: a plurality of fluid control units each including a flow path through which gas flows, and fluid control devices provided in the middle of the flow path; a merging flow path including a plurality of connecting portions fluidly connected to the plurality of fluid control units and a single gas outlet portion which derives the gas introduced through the plurality of connecting portions; wherein a plurality of connecting portions is arranged symmetrically with respect to the gas outlet portion in the flow path direction of the merging flow path, and two or more fluid control units are fluidly connected to each of the plurality of connecting portions.