The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2025
Filed:
Oct. 19, 2022
Applicant:
Disco Corporation, Tokyo, JP;
Inventor:
Tsubasa Hirose, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/268 (2006.01); B23K 26/08 (2014.01); B23K 26/57 (2014.01); H01L 21/78 (2006.01);
U.S. Cl.
CPC ...
H01L 21/268 (2013.01); B23K 26/0823 (2013.01); B23K 26/57 (2015.10); H01L 21/78 (2013.01); H01L 2221/6834 (2013.01);
Abstract
There is provided a processing method of a workpiece including a necessary region and an unnecessary region. The processing method includes a protective wall forming step of irradiating a region that defines the boundary between the necessary region and the unnecessary region with a laser beam with a wavelength that has transmissibility with respect to the workpiece and forming a plurality of shield tunnels composed of a fine pore and a modified tube that surrounds the fine pore, thereby forming a protective wall, and an unnecessary region removal step of removing the unnecessary region after executing the protective wall forming step.