The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2025
Filed:
Sep. 28, 2020
Asml Netherlands B.v., Veldhoven, NL;
Scott Anderson Middlebrooks, Duizel, NL;
Patrick Warnaar, Tilburg, NL;
Patrick Philipp Helfenstein, Eindhoven, NL;
Alexander Prasetya Konijnenberg, Veldhoven, NL;
Maxim Pisarenco, Son en Breugel, NL;
Markus Gerardus Martinus Maria Van Kraaij, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method and system for predicting complex electric field images with a parameterized model are described. A latent space representation of a complex electric field image is determined based on dimensional data in a latent space of the parameterized model for a given input to the parameterized model. The given input may be a measured amplitude (e.g., intensity) associated with the complex electric field image. The complex electric field image is predicted based on the latent space representation of the complex electric field image. The predicted complex electric field image includes an amplitude and a phase. The parameterized model comprises encoder-decoder architecture. In some embodiments, determining the latent space representation of the electric field image comprises minimizing a function constrained by a set of electric field images that could be predicted by the parameterized model based on the dimensional data in the latent space and the given input.