The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2025
Filed:
Jan. 08, 2023
Changxin Memory Technologies, Inc., Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Abstract
Embodiments relate to a semiconductor structure and a method for fabricating the same. The semiconductor structure includes: a base substrate including a trench, where the trench includes a gate structure whose top surface is lower than a top surface of the trench; first etch stop layers, where the first etch stop layers cover the top surface of the gate structure, part of a side wall of the trench, and an upper surface of the base substrate; an enclosed isolation structure positioned between the first etch stop layers in the trench, where the enclosed isolation structure at least plugs an opening of the trench; and an air gap positioned between the first etch stop layer and the enclosed isolation structure, where the air gap at least includes a transverse portion, and a bottom of the enclosed isolation structure is positioned on the transverse portion.