The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2025
Filed:
Apr. 26, 2022
Nuflare Technology, Inc., Yokohama, JP;
Haruyuki Nomura, Yokohama, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
The disclosure relates to a multiple charged particle beam writing apparatus that includes a dose representative value calculator that determines a representative dose for each mesh region irradiated by multiple beams. A calculation processor computes the temperature rise in a mesh region of interest due to beam irradiation, using a convolution of the dose values and a thermal spread function. An effective temperature calculator repeats this process while shifting the processing region along the stripe to obtain multiple temperature rises of the mesh area of interest and calculate a representative value of the multiple temperature rises as an effective temperature of the mesh area of interest. Based on the effective temperature, a dose corrector adjusts the beam doses to compensate for resist heating effects.