The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Aug. 08, 2022
Changxin Memory Technologies, Inc., Hefei, CN;
Beijing Superstring Academy of Memory Technology, Beijing, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY, Beijing, CN;
Abstract
Embodiments provide a semiconductor structure and a fabrication method thereof, which relate to the field of semiconductor technology. The method for fabricating a semiconductor structure includes: providing a substrate; forming a plurality of active pillars arranged in an array in the substrate; and forming a gate arranged around each of the active pillars, where a projection of the gate on the active pillar covers a channel region of the active pillar. Along a direction perpendicular to the substrate, the gate includes a first conductive layer and a second conductive layer sequentially arranged in a stack, and a work function of the first conductive layer is different from a work function of the second conductive layer.