The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Mar. 16, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Jeffrey Yat Shan Au, Sunnyvale, CA (US);
Joshua Thomas Maher, Sunnyvale, CA (US);
Varoujan Chakarian, San Jose, CA (US);
Sidharth Bhatia, Santa Cruz, CA (US);
Patrick Tae, Sunnyvale, CA (US);
Zhaozhao Zhu, Milpitas, CA (US);
Blake W. Erickson, Gilroy, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method includes receiving, by a processing device, first sensor data indicating a state of a wall corresponding to a first processing chamber. The first sensor data includes optical spectral data. The method further includes determining, by the processing device, a first value based on the first sensor data. The first value corresponds to a first amount of a product disposed along a surface of the wall at a first time. The method further includes determining, by the processing device, a first update to a first process operation associated with the first processing chamber based on the first value. The method further includes performing, by the processing device, one or more of (i) preparing a notification indicating the first update for presentation on a graphical user interface (GUI), or (ii) causing performance of the first process operation in accordance with the first update.