The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 11, 2025

Filed:

Mar. 07, 2025
Applicant:

Camtek Ltd., Migdal Ha'emek, IL;

Inventors:

Boris Ferdman, Adi, IL;

Tomer Gilad, Kiryat Tivon, IL;

Assignee:

Camtek Ltd., Migdal Ha'emek, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02097 (2022.01); G01B 9/02015 (2022.01); G01B 9/04 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02097 (2013.01); G01B 9/0203 (2013.01); G01B 9/04 (2013.01); G01B 2210/56 (2013.01); G01B 2290/70 (2013.01);
Abstract

A self-referencing interferometric microscope uses near-common-path, common component beam separators to produce two beams that illuminate the sample at different angles. Two return beams collected from the sample interfere at the image plane to produce an interferometric image of the sample comprising fringes across the image. The image can be processed to determine the topography of the sample.


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