The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2025
Filed:
Apr. 08, 2022
Tokyo Electron Limited, Tokyo, JP;
Shinya Kurebayashi, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A device inspection apparatus includes a voltage source that applies a voltage to a device to be inspected, a plurality of resistors connected in series between the voltage source and the device, a detector that detects a potential difference across both ends of a resistor group that includes one or more resistors among the plurality of resistors, a switching device that switches the resistor group from which the detector detects the potential difference among the plurality of resistors, and a controller. The controller controls the detector and the switching device, so as to detect a potential difference across both ends of at least two or more different resistor groups, and controls the detector and the switching device to detect the potential difference in an ascending order of a combined resistance value between both ends of the at least two or more resistor groups.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile