The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2025
Filed:
Dec. 15, 2021
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Brent A. Anderson, Jericho, VT (US);
Junli Wang, Slingerlands, NY (US);
Indira Seshadri, Niskayuna, NY (US);
Ruilong Xie, Niskayuna, NY (US);
Dechao Guo, Niskayuna, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 30/01 (2025.01); H10D 30/62 (2025.01); H10D 64/01 (2025.01);
U.S. Cl.
CPC ...
H10D 30/0243 (2025.01); H10D 30/6212 (2025.01); H10D 64/015 (2025.01);
Abstract
The embodiments herein describe a crossbar VFET where the crossbar channel (or fin) that extends between a pair of channels (fins) has reduced corner rounding, or no corner rounding. This can be achieved by developing a masking feature before etching the channels in the VFET that results in reduced, or no corner rounding in the channel structure etched using the masking feature.