The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Nov. 18, 2022
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Shingo Koiwa, Miyagi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32724 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/334 (2013.01); H01L 21/6833 (2013.01);
Abstract
There are provided an electrostatic chuck that attracts a substrate, and includes a dielectric and an attracting electrode for attracting the substrate inside of the dielectric, a heater electrode for heating the substrate, an attracting power source for applying an attraction voltage for attracting the substrate to the attracting electrode, and a heating power source for applying a heater voltage for heating the substrate to the heater electrode, wherein the attracting power source controls a magnitude of the attraction voltage that is applied to the attracting electrode based on a magnitude of the heater voltage.