The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Oct. 19, 2022
Applicant:
Disco Corporation, Tokyo, JP;
Inventors:
Takenobu Mori, Tokyo, JP;
Mai Haneda, Tokyo, JP;
Atsushi Nakatsuka, Tokyo, JP;
Atsushi Takagi, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 49/10 (2006.01); B24B 7/07 (2006.01); B24B 7/16 (2006.01); B24B 49/00 (2012.01);
U.S. Cl.
CPC ...
B24B 49/10 (2013.01); B24B 7/075 (2013.01); B24B 7/16 (2013.01); B24B 49/006 (2013.01);
Abstract
Stored is a height of a grinding mechanism when lower surfaces of grinding stones have come into contact with an upper surface of a wafer held on a holding surface, through lowering of the grinding mechanism from above the wafer. Based on this height, an origin point height which is a height of the grinding mechanism when the lower surfaces of the grinding stones have come into contact with the holding surface is then determined.