The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 14, 2025

Filed:

Jun. 02, 2022
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Chih-Hao Wang, Hsinchu County, TW;

Ching-Wei Tsai, Hsinchu, TW;

Yu-Xuan Huang, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 64/01 (2025.01); H10D 30/01 (2025.01); H10D 30/67 (2025.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01);
U.S. Cl.
CPC ...
H10D 64/017 (2025.01); H10D 30/031 (2025.01); H10D 30/6713 (2025.01); H10D 30/6735 (2025.01); H10D 64/021 (2025.01); H10D 84/013 (2025.01); H10D 84/0147 (2025.01); H10D 84/0151 (2025.01); H10D 84/038 (2025.01);
Abstract

A method includes forming a first semiconductor layer over a substrate; forming a dummy material covering a first sidewall of the first semiconductor layer; forming source/drain epitaxy structures over the substrate and in contact with the first semiconductor layer; forming an interfacial layer on a top surface and a second sidewall of the first semiconductor layer that are uncovered by the dummy material; removing the dummy material to expose the first sidewall of the first semiconductor layer; forming a second semiconductor layer on the first sidewall of the first semiconductor layer after removing the dummy material, in which the second semiconductor layer and the source/drain epitaxy structures have different conductivity types; and forming a gate electrode over the interfacial layer.


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