The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2025
Filed:
Jan. 12, 2023
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Tien-Lu Lin, Hsinchu, TW;
Jung-Hung Chang, Changhua County, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Abstract
A device includes a substrate. A first semiconductor fin and a second semiconductor fin are over the substrate, wherein an upper portion of the second semiconductor fin and a lower portion of the second semiconductor fin are made of different materials. A first epitaxy structure is over the first semiconductor fin. A second epitaxy structure is in contact with the upper portion of the second semiconductor fin, wherein sidewalls of the lower portion of the second semiconductor fin are free of coverage by the second epitaxy structure. A liner is in contact with the sidewalls of the lower portion of the second semiconductor fin. An isolation structure between the first and second semiconductor fin, wherein the isolation structure is in contact with the first semiconductor fin and is separated from the second semiconductor fin through the liner.