The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2025
Filed:
Sep. 23, 2022
Applicant:
Onto Innovation Inc., Wilmington, MA (US);
Inventors:
Yulei Sun, Flower Mound, TX (US);
Shelby Crain, Sachse, TX (US);
Stephen Mcwilliams, Carrollton, TX (US);
Assignee:
Onto Innovation Inc., Wilmington, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 13/02 (2006.01);
U.S. Cl.
CPC ...
G05B 13/027 (2013.01);
Abstract
Disclosed techniques for applying a neural network deep learning model in a fabrication strategy for high-mix semiconductor manufacturing, such as deposition, chemical-mechanical polishing (CMP), etching, photolithography, plating, etc. Training and normal operation modes of the fabrication strategy are described.