The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2025
Filed:
Dec. 17, 2021
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Takehiro Shindo, Yamanashi, JP;
Akira Takahashi, Iwate, JP;
Takashi Horiuchi, Yamanashi, JP;
Toshiaki Kodama, Yamanashi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25J 9/16 (2006.01); B25J 11/00 (2006.01); B25J 13/08 (2006.01); B25J 15/00 (2006.01); B25J 17/02 (2006.01); B25J 19/00 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
B25J 9/1628 (2013.01); B25J 11/0095 (2013.01); B25J 13/088 (2013.01); B25J 15/0014 (2013.01); B25J 17/0275 (2013.01); H01L 21/68707 (2013.01); B25J 19/0083 (2013.01);
Abstract
There is provided an apparatus for transporting a substrate. The apparatus comprises: an end effector including a fork which holds the substrate and a wrist part which holds a proximal end portion of the fork; an arm provided with the end effector installed thereon and a mechanism which moves the fork; and an inclination adjusting mechanism provided between the fork and the wrist part or between the wrist part and the arm to adjust an inclination of the fork.