The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 07, 2025

Filed:

Jan. 15, 2021
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Chun-Chieh Lu, Taipei, TW;

Tzu Ang Chao, Hsinchu, TW;

Chao-Ching Cheng, Hsinchu, TW;

Lain-Jong Li, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 48/36 (2025.01); H01L 21/02 (2006.01); H01L 21/4757 (2006.01); H01L 23/31 (2006.01); H10D 30/67 (2025.01); H10D 62/80 (2025.01); H10D 64/62 (2025.01); H10D 84/02 (2025.01); H10D 84/85 (2025.01); H10D 99/00 (2025.01); H10K 10/46 (2023.01); H10K 10/84 (2023.01); H10K 10/88 (2023.01); H10K 19/10 (2023.01); H10K 85/20 (2023.01);
U.S. Cl.
CPC ...
H10D 48/362 (2025.01); H01L 21/02181 (2013.01); H01L 21/0228 (2013.01); H01L 21/02568 (2013.01); H01L 21/47576 (2013.01); H01L 23/3171 (2013.01); H10D 30/6729 (2025.01); H10D 30/6739 (2025.01); H10D 30/6757 (2025.01); H10D 62/80 (2025.01); H10D 64/62 (2025.01); H10D 84/02 (2025.01); H10D 84/85 (2025.01); H10D 99/00 (2025.01); H10K 10/466 (2023.02); H10K 10/484 (2023.02); H10K 10/84 (2023.02); H10K 10/88 (2023.02); H10K 19/10 (2023.02); H10K 85/221 (2023.02);
Abstract

A device includes a semiconductor substrate, a low-k dielectric layer over the semiconductor substrate, an isolation layer over the low-k dielectric layer, and a work function layer over the isolation layer. The work function layer is an n-type work function layer. The device further includes a low-dimensional semiconductor layer on a top surface and a sidewall of the work function layer, source/drain contacts contacting opposing end portions of the low-dimensional semiconductor layer, and a dielectric doping layer over and contacting a channel portion of the low-dimensional semiconductor layer. The dielectric doping layer includes a metal selected from aluminum and hafnium, and the channel portion of the low-dimensional semiconductor layer further comprises the metal.


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