The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 30, 2025

Filed:

May. 19, 2023
Applicant:

Jeol Ltd., Tokyo, JP;

Inventor:

Yuji Konyuba, Tokyo, JP;

Assignee:

JEOL Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); G06T 5/50 (2006.01); G06V 10/28 (2022.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); G06T 5/50 (2013.01); G06V 10/28 (2022.01); G06T 2207/10061 (2013.01); G06T 2207/20221 (2013.01);
Abstract

An electron microscope includes an electronic optical system that irradiates a specimen with an electron beam and forms an image; a camera that includes an image sensor and outputs a frame image; and a computation unit that generates an image based on the frame image. The computation unit sets a threshold; and binarizes the frame image using the threshold, and generates the image based on the binarized frame image. In setting the threshold, the computation unit repeatedly sets a tentative threshold, acquires a plurality of the frame images obtained on a condition that electrons entering the image sensor follow Poisson process, binarizes each of the plurality of acquired frame images using the tentative threshold, generates an integrated image by integrating the plurality of binarized frame images, and obtains a normalized constant based on a mean and variance of pixel values of pixels of the integrated image.


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