The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 23, 2025

Filed:

May. 21, 2024
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Jia-Chuan You, Taoyuan, TW;

Chia-Hao Chang, Hsinchu, TW;

Yu-Ming Lin, Hsinchu, TW;

Chih-Hao Wang, Hsinchu County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 30/62 (2025.01); H01L 21/28 (2025.01); H01L 21/321 (2006.01); H01L 21/768 (2006.01); H10D 30/01 (2025.01); H10D 64/01 (2025.01); H10D 64/66 (2025.01); H10D 64/68 (2025.01);
U.S. Cl.
CPC ...
H10D 30/6211 (2025.01); H01L 21/28088 (2013.01); H01L 21/3212 (2013.01); H01L 21/76829 (2013.01); H10D 30/0243 (2025.01); H10D 30/6219 (2025.01); H10D 64/017 (2025.01); H10D 64/021 (2025.01); H10D 64/667 (2025.01); H10D 64/681 (2025.01);
Abstract

A method includes a gate electrode, a first spacer, a second spacer, a metal cap, and a dielectric structure. The gate electrode is over a substrate. The first spacer structure extends along a first sidewall of the gate electrode. The second spacer structure extends along a second sidewall of the gate electrode. The metal cap is over the gate electrode. The dielectric structure is over the gate electrode, the first spacer structure, and the second spacer structure. The dielectric structure has a top segment higher than a top segment of the metal cap.


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