The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2025
Filed:
May. 25, 2023
Applicant:
Disco Corporation, Tokyo, JP;
Inventor:
Kazuma Sekiya, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6835 (2013.01); H01L 21/67092 (2013.01); H01L 21/67132 (2013.01);
Abstract
An apparatus for processing a workpiece includes a holding table having a holding surface for holding the workpiece thereon, a processing unit for processing the workpiece held on the holding surface of the holding table, and a table cover for covering the holding surface when the workpiece is not held on the holding surface. The table cover has a contact surface for contacting at least the holding surface of the holding table, the contact surface being adhesive in nature.