The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 23, 2025

Filed:

Mar. 02, 2023
Applicant:

Disco Corporation, Tokyo, JP;

Inventor:

Shunsuke Teranishi, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/56 (2006.01); H01L 21/304 (2006.01); H01L 21/78 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/561 (2013.01); H01L 21/304 (2013.01); H01L 21/78 (2013.01); H01L 24/97 (2013.01); H01L 2224/97 (2013.01);
Abstract

There is provided a method of manufacturing package devices, including a first substrate preparing step of preparing a first substrate in which a device chip is mounted in each of a plurality of mounting areas, a second substrate preparing step of preparing a second substrate including a plurality of recessed portions that are capable of housing the device chips, a bonding step of bonding the first substrate and the second substrate together in such a manner that the device chips are housed in the recessed portions, a grinding step of grinding the second substrate until the recessed portions are exposed, a resin molding step of supplying resin to the plurality of recessed portions and covering the device chips by the resin, and a dividing step of dividing the first substrate and the second substrate and manufacturing a plurality of package devices each including the device chips.


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