The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2025
Filed:
Mar. 22, 2022
Asml Netherlands B.v., Veldhoven, NL;
Remco Van De Meerendonk, 's-Hertogenbosch, NL;
Daniel Jozef Maria Direcks, Simpelveld, NL;
Güneş Nakiboǧlu, Eindhoven, NL;
Nicholas Peter Waterson, Veldhoven, NL;
Joost André Klugkist, Waalre, NL;
Sven Pekelder, Breugel, NL;
Antonius Johannus Van Der Net, Tilburg, NL;
Johannes Henricus Wilhelmus Jacobs, Heeze, NL;
Jaap Oudes, Eindhoven, NL;
Gerardus Arnoldus Hendricus Franciscus Janssen, Eindhoven, NL;
Jeroen Peterus Johannes Van Lipzig, Beesel, NL;
Johannes Franciscus Martinus Van Santvoort, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A temperature conditioning system using conditioning liquid to condition a temperature of an object, the system including a conditioning conduit, a return conduit, a supply chamber, and a discharge chamber, wherein the temperature conditioning system is arranged to provide a static pressure difference between the supply chamber outlet and the discharge chamber inlet to create a flow through the conditioning conduit. A lithography apparatus and a method of temperature conditioning an object is also described.