The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2025
Filed:
May. 28, 2020
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Hiroyuki Kanda, Tokyo, JP;
Hironari Ikeda, Tokyo, JP;
Masaaki Kimura, Tokyo, JP;
Mizuki Nagai, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 17/00 (2006.01); C25D 17/02 (2006.01); C25D 17/10 (2006.01);
U.S. Cl.
CPC ...
C25D 17/002 (2013.01); C25D 17/001 (2013.01); C25D 17/02 (2013.01); C25D 17/10 (2013.01); C25D 17/008 (2013.01);
Abstract
Provided are an anode holder capable of reducing consumption of an additive in a plating apparatus, and a plating apparatus. An anode holder for holding an anode for use in a plating apparatus is provided, and the anode holder includes an inner space formed in the anode holder, to house the anode, a mask including a plurality of holes, and configured to cover a front surface of the inner space, and a diaphragm, at least part of the diaphragm being fixed to the mask in a region of the mask that covers the front surface of the inner space.