The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2025
Filed:
Oct. 14, 2022
Commissariat À L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Abstract
A semiconductor device made on a substrate including an active region and a non-active region at least partially surrounding the active region, a plurality of gate stacks, a part of each gate stack being on the active region, each gate stack being separated from adjacent gate stacks by a spacer by a distance e, the device being such that, for each gate stack, the part of the gate stack located on the active region has a height h, the part of the same gate stack located on the non-active region has a height h, and h/e=aand h/e=a<awhere ais an aspect ratio such that, upon growth of the spacer material forming the spacers, an airgap is in the spacer, and ais an aspect ratio such that, upon growth of the spacer material forming the spacers, no airgap is in the spacer.