The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 02, 2025

Filed:

Apr. 29, 2024
Applicant:

Globalfoundries Singapore Pte. Ltd., Singapore, SG;

Inventors:

Bong Woong Mun, Singapore, SG;

Khon Cho, Singapore, SG;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H10D 30/66 (2025.01); H10D 30/01 (2025.01); H10D 62/10 (2025.01); H10D 64/27 (2025.01);
U.S. Cl.
CPC ...
H10D 30/663 (2025.01); H10D 30/0291 (2025.01); H10D 62/116 (2025.01); H10D 64/518 (2025.01);
Abstract

The present disclosure relates to semiconductor structures and, more particularly, to devices with a three dimensional channel and methods of manufacture. The structure includes: a drift region within a semiconductor substrate; a shallow trench isolation structure within the drift region; and a gate structure within the shallow trench isolation structure and extending to an upper surface of the semiconductor substrate adjacent to the drift region.


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