The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 02, 2025

Filed:

Jun. 24, 2024
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Ming-Fa Chen, Taichung, TW;

Chao-Wen Shih, Hsinchu County, TW;

Hsien-Wei Chen, Hsinchu, TW;

Sung-Feng Yeh, Taipei, TW;

Tzuan-Horng Liu, Taoyuan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 25/065 (2023.01); H01L 21/304 (2006.01); H01L 21/56 (2006.01); H01L 21/683 (2006.01); H01L 23/00 (2006.01); H01L 23/31 (2006.01); H01L 23/538 (2006.01); H01L 23/544 (2006.01); H10D 86/01 (2025.01);
U.S. Cl.
CPC ...
H01L 25/0657 (2013.01); H01L 21/304 (2013.01); H01L 21/56 (2013.01); H01L 23/3157 (2013.01); H01L 23/5384 (2013.01); H01L 23/544 (2013.01); H01L 24/05 (2013.01); H01L 21/6835 (2013.01); H01L 2224/0231 (2013.01); H01L 2224/02372 (2013.01); H01L 2224/80203 (2013.01); H01L 2224/8084 (2013.01); H01L 2225/06541 (2013.01); H10D 86/0214 (2025.01);
Abstract

A package includes a carrier substrate, a first die, and a second die. The first die and the second die are stacked on the carrier substrate in sequential order. The first die includes a first bonding layer, a second bonding layer, and an alignment mark embedded in the first bonding layer. The second die includes a third bonding layer. A surface of the first bonding layer form a rear surface of the first die and a surface of the second bonding layer form an active surface of the first die. The rear surface of the first die is in physical contact with the carrier substrate. The active surface of the first die is in physical contact with the third bonding layer of the second die.


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