The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Aug. 29, 2022
Nuflare Technology, Inc., Yokohama, JP;
Kazuhiko Inoue, Yokohama, JP;
Munehiro Ogasawara, Hiratsuka, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
A multi-electron beam image acquisition apparatus includes a first electromagnetic lens configured to focus multiple primary electron beams to form an image on a substrate, and a second electromagnetic lens configured to be able to variably adjust a peak position of a magnetic field distribution in a direction of a trajectory central axis of multiple secondary electron beams, and to focus the multiple secondary electron beams to form an image on either one of a detection surface of a detector and a position conjugate to the detection surface. The first electromagnetic lens focuses, to form an image, the multiple secondary electron beams before they are separated from the multiple primary electron beams, and the second electromagnetic lens is arranged between a separator which separates the multiple secondary electron beams and an image forming point on which the multiple secondary electron beams are focused by the first electromagnetic lens.