The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Jul. 18, 2019
Applicants:
Lintfield Limited, Tonbridge, GB;
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Christopher Wall, Tonbridge, GB;
Seiji Nagahara, Tokyo, JP;
Assignees:
LINTFIELD LIMITED, Tonbridge, GB;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07D 495/10 (2006.01); C07D 335/16 (2006.01); C07D 495/04 (2006.01); C07D 495/20 (2006.01); G03F 7/004 (2006.01); G03F 7/031 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
C07D 495/10 (2013.01); C07D 335/16 (2013.01); C07D 495/04 (2013.01); C07D 495/20 (2013.01); G03F 7/0045 (2013.01); G03F 7/031 (2013.01); G03F 7/0392 (2013.01);
Abstract
Latent photoinitiator compounds are described, as well as compositions containing such compounds and their uses in photoinitiated methods for producing photoresist structures.