The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 19, 2025

Filed:

Feb. 11, 2025
Applicant:

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, CN;

Inventors:

Bayan Heshig, Changchun, CN;

Xinyu Wang, Changchun, CN;

Zhaowu Liu, Changchun, CN;

Shan Jiang, Changchun, CN;

Wenhao Li, Changchun, CN;

Wei Wang, Changchun, CN;

Xingyu Zhu, Changchun, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2022.01); G01B 9/02015 (2022.01); G01B 11/02 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02029 (2013.01); G01B 9/02027 (2013.01); G01B 9/02045 (2013.01); G01B 11/026 (2013.01); G01B 2290/70 (2013.01);
Abstract

The present invention relates to the field of optics, in particular to a hybrid displacement measuring device, comprising a worktable to be measured, a grating ruler, a laser light source, a first beam splitting mirror, a first measuring assembly, and a second measuring assembly which comprises a first interferometer. A hybrid measuring approach that integrates grating and laser is proposed based on the advantages of the two measuring means. The grating ruler is used to perform long-distance measurement distal to the mirror, and the first interferometer is used to perform short-distance measurement proximal to the mirror, thereby solving the problem that it is difficult to guarantee both the range and the precision of displacement measurement of the worktable to be measured.


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