The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2025
Filed:
Sep. 16, 2022
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Asml Netherlands B.v., Veldhoven, NL;
Galip Tuna Turkbey, Veldhoven, NL;
Hubertus Renier Maria Van Lierop, Veldhoven, NL;
Alexander Petrus Josephus Van Lankvelt, Veldhoven, NL;
Erik Roelof Loopstra, Ederheim Huernheim, DE;
Ahmet Levent Avsar, Veldhoven, NL;
CARL ZEISS SMT GMBH, Oberkochen, DE;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A vibration isolator () for supporting a payload and isolating the payload from vibrations has: a pressurized gas compartment () formed with a rigid base structure (), which base structure has an opening () covered with a flexible membrane () having an inner surface () facing into the gas compartment and an outer surface () facing in the opposite direction, a support member () for supporting the payload, which support member is arranged in contact with the outer surface () of the membrane, and a clamping member () arranged at the inner surface () of the membrane, wherein the support member and the clamping member form a clamping system (), which system includes at least one magnetic element () effecting the membrane to be pressed against the support member.