The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 12, 2025

Filed:

Apr. 01, 2019
Applicant:

The Regents of the University of California, Oakland, CA (US);

Inventors:

Takeshi Kamikawa, Santa Barbara, CA (US);

Srinivas Gandrothula, Santa Barbara, CA (US);

Hongjian Li, Goleta, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10H 20/01 (2025.01); C30B 25/04 (2006.01); C30B 29/40 (2006.01); H01L 21/02 (2006.01); H01S 5/042 (2006.01); H01S 5/22 (2006.01); H01S 5/343 (2006.01); H10D 62/40 (2025.01); H10D 62/85 (2025.01); H10H 20/818 (2025.01); H10H 20/825 (2025.01);
U.S. Cl.
CPC ...
H10H 20/01335 (2025.01); C30B 25/04 (2013.01); C30B 29/403 (2013.01); H01L 21/0242 (2013.01); H01L 21/0254 (2013.01); H01L 21/02609 (2013.01); H01L 21/02639 (2013.01); H01L 21/02647 (2013.01); H01S 5/0425 (2013.01); H01S 5/221 (2013.01); H01S 5/2214 (2013.01); H01S 5/34333 (2013.01); H10D 62/405 (2025.01); H10D 62/8503 (2025.01); H10H 20/818 (2025.01); H10H 20/825 (2025.01);
Abstract

A method of fabricating a semiconductor device, comprising: forming a growth restrict mask on or above a III-nitride substrate, and growing one or more island-like III-nitride semiconductor layers on the III-nitride substrate using the growth restrict mask. The III-nitride substrate has an in-plane distribution of off-angle orientations with more than 0.1 degree; and the off-angle orientations of an m-plane oriented crystalline surface plane range from about +28 degrees to about −47 degrees towards a c-plane. The island-like III-nitride semiconductor layers have at least one long side and short side, wherein the long side is perpendicular to an a-axis of the island-like III-nitride semiconductor layers. The island-like III-nitride semiconductor layers do not coalesce with neighboring island-like III-nitride semiconductor layers.


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