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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12386270 B1

PDFFull Text
Date of Patent:
Aug. 12, 2025

Filed:

May. 11, 2023

Mode control of photonic crystal fiber based broadband radiation sources

Applicants:

Asml Netherlands B.v., Veldhoven, NL;

Asml Holding N.v., Veldhoven, NL;

Inventors:

Sebastian Thomas Bauerschmidt, Wendelstein, DE;

Peter Maximilian Götz, Altdorf, DE;

Patrick Sebastian Uebel, Marloffstein, DE;

Ronald Franciscus Herman Hugers, Best, NL;

Jan Adrianus Boer, Eindhoven, NL;

Edwin Johannes Cornelis Bos, Dommelen, NL;

Andreas Johannes Antonius Brouns, Eindhoven, NL;

Vitaliy Prosyentsov, Helmond, NL;

Paul William Scholtes-Van Eijk, Veldhoven, NL;

Paulus Antonius Andreas Teunissen, Eindhoven, NL;

Mahesh Upendra Ajgaonkar, Guilford, CT (US);

Assignees:

ASML NETHERLANDS B.V., Veldhoven, NL;

ASML HOLDING N.V., Veldhoven, NL;

Attorney:

PILLSBURY WINTHROP SHAW PITTMAN, LLP

Primary Examiner:

Peter B Kim

Int. Cl.
CPC ...
G03F 7/00 (2006.01); G01B 11/27 (2006.01); G01J 1/42 (2006.01); G01M 11/00 (2006.01); G02B 1/00 (2006.01); G02B 6/02 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70625 (2013.01); G01B 11/27 (2013.01); G01J 1/4257 (2013.01); G01M 11/30 (2013.01); G02B 1/005 (2013.01); G02B 6/02 (2013.01); G03F 7/70525 (2013.01); G03F 7/7065 (2013.01);
Abstract

A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.

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