The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2025
Filed:
Oct. 14, 2022
Ict Integrated Circuit Testing Gesellschaft Für Halbleiterprüftechnik Mbh, Heimstetten, DE;
Abstract
A method of determining a brightness (B) of a charged particle beam () focused by a focusing lens () toward a sample () in a charged particle beam imaging device () is described. The method includes (a) taking one or more images (h) of the sample with the charged particle beam imaging device; (b) retrieving one or more beam profiles (g) of the charged particle beam from the one or more images; and (c) determining the brightness (B) of the charged particle beam () based on at least the one or more beam profiles (g, g), a probe current (I) of the charged particle beam, and a landing potential (LE) of the charged particle beam. Optionally, the brightness (B) determined as above can be used for determining a size (D) of a source () of the charged particle beam (). Further, a charged particle beam imaging device () configured for any of the methods described herein is provided.