The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2025
Filed:
Sep. 21, 2021
Tokyo Electron Limited, Tokyo, JP;
Munehito Kagaya, Yamanashi, JP;
Yusuke Suzuki, Yamanashi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A recess filling method includes a combined process including a film formation process of forming a film in recesses formed on the surface of a substrate and having different aspect ratios, and an etching process of etching the film formed in the recesses; and a repetition process of repeating the combined process n times (n is a natural number of 2 or more), wherein the repetition process includes: a first combined process of performing the etching process with a first etching amount suitable for filling, with the film, a first recess having a first aspect ratio; and a second combined process of performing the etching process with a second etching amount that is smaller than the first etching amount and is suitable for filling, with the film, a second recess having a second aspect ratio lower than the first aspect ratio.