The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2025
Filed:
Feb. 07, 2024
Samsung Electronics Co., Ltd., Suwon-si, KR;
Seok Heo, Suwon-si, KR;
Cha Won Koh, Suwon-si, KR;
Sang Joon Hong, Suwon-si, KR;
Hyun Woo Kim, Suwon-si, KR;
Kyung-Won Kang, Suwon-Si, KR;
Dong-Wook Kim, Suwon-si, KR;
Kyung Won Seo, Suwon-si, KR;
Young Il Jang, Suwon-si, KR;
Yong Suk Choi, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
A substrate processing apparatus includes a photoresist coater applying a photoresist film on a substrate, a humidifier increasing an amount of moisture in an ambient to which the photoresist film on the substrate is exposed, and an exposer irradiating the photoresist film exposed to the ambient having the increased amount of moisture with light. The humidifier is disposed between the photoresist coater and the exposer.