The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 29, 2025

Filed:

Jan. 02, 2024
Applicant:

Nova Ltd., Rehovot, IL;

Inventors:

Eyal Hollander, Ramat Hasharon, IL;

Gilad Barak, Rehovot, IL;

Elad Schleifer, Rehovot, IL;

Yonatan Oren, Kiryat Ono, IL;

Amir Shayari, Rehovot, IL;

Assignee:

NOVA LTD., Rehovot, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/44 (2006.01); G01J 3/02 (2006.01); G01N 21/65 (2006.01);
U.S. Cl.
CPC ...
G01N 21/65 (2013.01); G01J 3/0205 (2013.01); G01J 3/027 (2013.01); G01J 3/4412 (2013.01); G01N 2201/06113 (2013.01); G01N 2201/0636 (2013.01);
Abstract

A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up


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