The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2025
Filed:
Jun. 09, 2022
Changxin Memory Technologies, Inc., Hefei, CN;
Beijing Superstring Academy of Memory Technology, BeiJing, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY, Beijing, CN;
Abstract
A semiconductor device and a manufacturing method thereof are provided. The method includes: forming a plurality of first trenches extending in a first direction on the substrate; forming a plurality of second trenches extending in a second direction on the substrate; forming a first isolation layer in at least one of the first trenches and at least one of the second trenches, first gaps are respectively provided between the first isolation layer and sidewalls on both sides of the first trench; forming two bit lines which are parallel to each other and extend in the first direction by depositing conductive layers of a first conductive material at bottoms of the first gaps on both sides of the first trench; and forming word lines extending in the second direction in the first trench and the second trench, and above the conductive layers in the first trench.