The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2025
Filed:
Sep. 06, 2022
Applicant:
Disco Corporation, Tokyo, JP;
Inventors:
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/308 (2006.01); C09D 101/28 (2006.01); C09D 129/04 (2006.01); C09D 139/06 (2006.01); H01L 21/3065 (2006.01); H01L 21/311 (2006.01); H01L 21/56 (2006.01); C08K 5/1545 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3081 (2013.01); C09D 101/284 (2013.01); C09D 129/04 (2013.01); C09D 139/06 (2013.01); H01L 21/3065 (2013.01); H01L 21/31144 (2013.01); H01L 21/56 (2013.01); C08K 5/1545 (2013.01);
Abstract
There is provided a protective film agent with which a workpiece is coated when the workpiece is processed. The protective film agent includes a water-soluble resin, a light absorbing agent having a flavone structure, a flavonol structure, or an isoflavone structure, and a solvent that dissolves the resin and the light absorbing agent.