The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 15, 2025

Filed:

Jun. 14, 2021
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Leonard P. Guler, Hillsboro, OR (US);

Mohammad Hasan, Aloha, OR (US);

Charles H. Wallace, Portland, OR (US);

Tahir Ghani, Portland, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 84/85 (2025.01); H10D 30/62 (2025.01); H10D 62/10 (2025.01);
U.S. Cl.
CPC ...
H10D 84/853 (2025.01); H10D 30/6211 (2025.01); H10D 30/6219 (2025.01); H10D 62/116 (2025.01); H10D 62/121 (2025.01);
Abstract

Integrated circuit structures having backside gate partial cut or backside trench contact partial cut and/or spit epitaxial structure are described. For example, an integrated circuit structure includes a first sub-fin structure over a first stack of nanowires. A second sub-fin structure is over a second stack of nanowires. A first portion of a gate electrode is around the first stack of nanowires, a second portion of the gate electrode is around the second stack of nanowires, and a third portion of the gate electrode bridges the first and second portions of the gate electrode. A dielectric structure is between the first portion of the gate electrode and the second portion of the gate electrode, the dielectric structure over the third portion of the gate electrode. The dielectric structure is continuous along the first and second portions of the gate electrode and the first and second sub-fin structures.


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