The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2025
Filed:
Jan. 18, 2022
Tokyo Electron Limited, Tokyo, JP;
H. Jim Fulford, Albany, NY (US);
Mark I. Gardner, Albany, NY (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
One or more 3D transistor structures that use one or more 2D materials as transistor channels along with methods for fabricating the same are disclosed. A 3D transistor can include a first carrier nanosheet at least partially surrounded by a first 2D material and a second carrier nanosheet at least partially surrounded by a second 2D material. The transistor can include a first source/drain structure in electrical contact with a first end of the first 2D material and a first end of the second 2D material. The transistor can include a second source/drain structure in electrical contact with a second end of the first 2D material and a second end of the second 2D material. The transistor can include a gate structure at least partially surrounding the first 2D material and the second 2D material.