The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2025
Filed:
Jun. 14, 2019
Aixtron SE, Herzogenrath, DE;
Peter Sebald Lauffer, Aachen, DE;
Francisco Ruda Y Witt, Eschweiler, DE;
AIXTRON SE, Herzogenrath, DE;
Abstract
A cover plate, for a CVD reactor, has a circumferential edge extending on a circular arc line, or a plurality of identically configured cover plates can be arranged in a circle such that their respective outer edges extending along circular arcs complement each other to form a complete circle. Storage spaces for substrates or substrate holders supporting substrates are located within the surface of the cover plate. The cover plate has openings which tunnel through the cover plate, and through which the upper side of a susceptor is visible, so that an optical temperature measurement can be carried out through the respective openings.