The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2025
Filed:
Dec. 14, 2021
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Megumi Uno, Tokyo, JP;
Akira Fukunaga, Tokyo, JP;
Chikako Takatoh, Tokyo, JP;
Yumiko Nakamura, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 1/12 (2024.01); B08B 1/20 (2024.01); B08B 1/32 (2024.01); B08B 1/50 (2024.01); B08B 3/04 (2006.01); B08B 13/00 (2006.01);
U.S. Cl.
CPC ...
B08B 1/50 (2024.01); B08B 1/12 (2024.01); B08B 1/20 (2024.01); B08B 1/32 (2024.01); B08B 3/041 (2013.01); B08B 13/00 (2013.01); H01L 21/67046 (2013.01);
Abstract
A cleaning apparatus for cleaning member has a member cleaning partthat cleans a cleaning memberthat cleans a substrate W; and a measurement partthat measures a degree of cleanliness of the cleaning membercleaned by the member cleaning part