The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 08, 2025

Filed:

Dec. 09, 2020
Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Christian Beyer, Freiberg, DE;

Francisco Javier Santos Rodriguez, Villach, AT;

Hans-Joachim Schulze, Taufkirchen, DE;

Marko David Swoboda, Dresden, DE;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/04 (2006.01); H01L 21/223 (2006.01); H01L 21/265 (2006.01); H01L 21/268 (2006.01); H01L 21/3105 (2006.01); H01L 21/683 (2006.01); H10D 62/832 (2025.01); H10D 84/03 (2025.01);
U.S. Cl.
CPC ...
H10D 84/035 (2025.01); H01L 21/02118 (2013.01); H01L 21/0445 (2013.01); H01L 21/2236 (2013.01); H01L 21/26506 (2013.01); H01L 21/268 (2013.01); H01L 21/31058 (2013.01); H01L 21/6835 (2013.01); H10D 62/8325 (2025.01); H01L 2221/68327 (2013.01);
Abstract

A method of splitting off a semiconductor wafer from a semiconductor bottle includes: forming a separation region within the semiconductor boule, the separation region having at least one altered physical property which increases thermo-mechanical stress within the separation region relative to the remainder of the semiconductor boule; and applying an external force to the semiconductor boule such that at least one crack propagates along the separation region and a wafer splits from the semiconductor boule.


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