The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2025
Filed:
Mar. 28, 2022
Disco Corporation, Tokyo, JP;
Shunsuke Teranishi, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A laminated device chip manufacturing method includes: a first wafer processing step of exposing a first resin layer disposed in first grooves to an undersurface side of a first wafer by thinning the first wafer fixed to a first support; a laminating step of laminating the undersurface side of the first wafer and a top surface side of a second wafer to each other such that the first resin layer exposed to the undersurface side of the first wafer and a second resin layer disposed in second grooves of the second wafer coincide with each other; a second wafer processing step of exposing the second resin layer disposed in the second grooves to an undersurface side of the second wafer by thinning the second wafer; and a resin layer cutting step of manufacturing laminated device chips by cutting the first resin layer and the second resin layer.