logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12353133 B1

PDFFull Text
Date of Patent:
Jul. 08, 2025

Filed:

Aug. 15, 2022

Silicon-containing composition and method of producing semiconductor substrate

Applicant:

Jsr Corporation, Tokyo, JP;

Inventors:

Ryuichi Serizawa, Tokyo, JP;

Kengo Hirasawa, Tokyo, JP;

Assignee:

JSR CORPORATION, Tokyo, JP;

Attorney:

Element IP, PLC

Primary Examiner:

John S Chu

Int. Cl.
CPC ...
G03F 7/11 (2006.01); C08G 77/00 (2006.01); C08G 77/04 (2006.01); C08G 77/24 (2006.01); C08G 77/385 (2006.01); G03F 7/075 (2006.01); G03F 7/09 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01); G03F 7/32 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); C08G 77/00 (2013.01); C08G 77/04 (2013.01); C08G 77/24 (2013.01); C08G 77/385 (2013.01); C08G 77/80 (2013.01); G03F 7/0757 (2013.01); G03F 7/2004 (2013.01); G03F 7/30 (2013.01); G03F 7/327 (2013.01);
Abstract

A silicon-containing composition includes a polysiloxane compound and solvent. The polysiloxane compound includes a fluorine atom and a group including an ester bond. The polysiloxane compound preferably includes a first structural unit represented by formula (1), and a second structural unit represented by formula (2). X represents a monovalent organic group having 1 to 20 carbon atoms and comprising a fluorine atom; Rrepresents a halogen atom, a hydroxy group, or a monovalent organic group having 1 to 20 carbon atoms; Y represents a monovalent organic group having 1 to 20 carbon atoms and comprising an ester bond; and Rrepresents a halogen atom, a hydroxy group, or a monovalent organic group having 1 to 20 carbon atoms.

Find Patent Forward Citations

Loading…