The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2025
Filed:
May. 11, 2021
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Charles Dezelah, Helsinki, FI;
Qi Xie, Wilsele, BE;
Petri Raisanen, Gilbert, AZ (US);
Dieter Pierreux, Dilbeek, BE;
Bert Jongbloed, Oud-Heverlee, BE;
Werner Knaepen, Leuven, BE;
Eric James Shero, Phoenix, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/02 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/02 (2013.01); C23C 16/4402 (2013.01); C23C 16/45557 (2013.01); C23C 16/45553 (2013.01);
Abstract
A method may comprise disposing vanadium tetrachloride in a delivery vessel; delivering the vanadium tetrachloride to a reaction chamber in fluid communication with the delivery vessel; mitigating the delivery of decomposition products of the vanadium tetrachloride to the reaction chamber; and/or applying the vanadium tetrachloride to a substrate disposed in the reaction chamber to form a layer comprising vanadium on the substrate.