The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2025
Filed:
May. 31, 2021
Ebara Corporation, Tokyo, JP;
Masaya Seki, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
Efficiency of a cleaning process and a degassing process for a surface to be processed of a substrate is improved. A pre-wet moduleincludes a stage, a rotation mechanism, a pre-wet chamber, an elevating mechanism, a degassing liquid supply member, a nozzle, and a cleaning liquid supply member. The stageis configured to hold a back surface of a substrate WF with a surface to be processed WF-a facing upward. The rotation mechanismis configured to rotate the stage. The pre-wet chamberincludes a lid memberand a tubular member. The lid memberhas an opposed surfaceopposed to the surface to be processed WF-a of the substrate WF. The tubular memberis installed on an outer edge portion of the opposed surfaceof the lid member. The elevating mechanismis configured to move up and down the pre-wet chamber. The degassing liquid supply memberis configured to supply a degassing liquid to a pre-wet spaceformed between the pre-wet chamberand the surface to be processed WF-a of the substrate WF. The nozzleis installed on the opposed surfaceof the lid member. The cleaning liquid supply memberis configured to supply a cleaning liquid to the surface to be processed WF-a of the substrate WF via the nozzle